6/21/2011	10:59:47 AM	Bypass valve opened
6/21/2011	11:02:59 AM	Bypass valve closed
6/21/2011	11:03:01 AM	Bypass valve opened
6/21/2011	11:03:02 AM	Bypass valve closed
6/21/2011	11:28:26 AM	Bypass valve opened
6/21/2011	11:46:06 AM	Bypass valve closed
6/21/2011	11:46:11 AM	Bypass valve opened
6/21/2011	11:46:48 AM	Bypass valve closed
6/21/2011	11:46:48 AM	Main Vac valve opened
6/21/2011	11:53:30 AM	Main Vac valve closed
6/21/2011	11:55:28 AM	Main Vac valve opened
6/21/2011	1:09:40 PM	Main Vac valve closed
6/21/2011	1:11:04 PM	Main Vac valve opened
6/21/2011	1:11:11 PM	Bypass valve opened
6/21/2011	4:29:40 PM	Main Vac valve closed
6/21/2011	4:29:40 PM	Bypass valve closed
6/21/2011	4:31:35 PM	Program exited cleanly
6/21/2011	4:36:03 PM	Program started normally
6/21/2011	4:36:03 PM	Helium valve closed
6/21/2011	4:36:03 PM	H2 valve closed
6/21/2011	4:36:03 PM	BCl3 valve closed
6/21/2011	4:36:03 PM	PH3 valve closed
6/21/2011	4:36:04 PM	SiCl4 pre valve closed
6/21/2011	4:36:04 PM	SiCl4 post valve closed
6/21/2011	4:36:04 PM	Main Vac valve closed
6/21/2011	4:36:04 PM	Bypass valve closed
6/21/2011	4:36:04 PM	Bubbler valve closed
6/21/2011	4:36:04 PM	Helium MFC set to  0.000000
6/21/2011	4:36:04 PM	H2 MFC set to  0.000000
6/21/2011	4:36:04 PM	BCl3 MFC set to  0.000000
6/21/2011	4:36:04 PM	PHl3 MFC set to  0.000000
6/21/2011	4:36:04 PM	SiCl4 MFC set to  0.000000
6/21/2011	4:36:04 PM	Bypass solenoid MFC set to  760.000000
6/21/2011	4:36:04 PM	Tube furnace set to 0
6/21/2011	4:36:58 PM	Recipe started at 4:36 PM
6/21/2011	4:36:58 PM	Helium valve closed
6/21/2011	4:36:58 PM	H2 valve closed
6/21/2011	4:36:58 PM	BCl3 valve closed
6/21/2011	4:36:58 PM	PH3 valve closed
6/21/2011	4:36:58 PM	SiCl4 pre valve closed
6/21/2011	4:36:58 PM	SiCl4 post valve closed
6/21/2011	4:36:58 PM	Main Vac valve closed
6/21/2011	4:36:58 PM	Bubbler valve closed
6/21/2011	4:36:58 PM	Bypass valve opened
6/21/2011	4:36:58 PM	Helium MFC set to  0.000000
6/21/2011	4:36:58 PM	H2 MFC set to  0.000000
6/21/2011	4:36:58 PM	BCl3 MFC set to  0.000000
6/21/2011	4:36:58 PM	PHl3 MFC set to  0.000000
6/21/2011	4:36:58 PM	SiCl4 MFC set to  0.000000
6/21/2011	4:36:58 PM	Bypass solenoid MFC set to  0.000000
6/21/2011	4:36:58 PM	Tube furnace set to 0
6/21/2011	4:36:59 PM	Helium valve closed
6/21/2011	4:36:59 PM	H2 valve closed
6/21/2011	4:36:59 PM	BCl3 valve closed
6/21/2011	4:36:59 PM	PH3 valve closed
6/21/2011	4:36:59 PM	SiCl4 pre valve closed
6/21/2011	4:36:59 PM	SiCl4 post valve closed
6/21/2011	4:36:59 PM	Bypass valve closed
6/21/2011	4:36:59 PM	Bubbler valve closed
6/21/2011	4:36:59 PM	Main Vac valve opened
6/21/2011	4:36:59 PM	Helium MFC set to  0.000000
6/21/2011	4:36:59 PM	H2 MFC set to  0.000000
6/21/2011	4:36:59 PM	BCl3 MFC set to  0.000000
6/21/2011	4:36:59 PM	PHl3 MFC set to  0.000000
6/21/2011	4:36:59 PM	SiCl4 MFC set to  0.000000
6/21/2011	4:36:59 PM	Bypass solenoid MFC set to  0.000000
6/21/2011	4:36:59 PM	Tube furnace set to 0
6/21/2011	4:37:04 PM	Run finished at 4:37 PM
6/21/2011	4:40:24 PM	Main Vac valve closed
6/21/2011	4:40:58 PM	Bypass valve opened
